We present a method for the formation of oriented polymeric nanofibers using electrospinning deposition from an integrated microfluidic device. The source includes a microfabricated triangular shaped tip, integrated at the exit of a microfluidic channel to form a source that can be brought close to a counter electrode and scanned over surface features. Using the ability to orient the nanofiber deposition, we formed a 140 nm diameter suspended nanofiber over etched trenches on a silicon wafer, a configuration that allows for electrical and mechanical measurements of deposited nanofibers. (C) 2003 American Institute of Physics.